Evaluation of Titanium Vacuum Chamber as Getter Pump
نویسندگان
چکیده
Methods for removing the surface oxide film have been investigated to make a titanium vacuum chamber itself act as getter pump. The build-up test of has performed investigate effect baking. result showed that higher baking temperature lower pressure rise during build-up. Especially at 400°C, kept less than 10-3 Pa after 2 h in vacuum-fired suggests once removed by high such 850°C furnace, can be more easily because regenerated is thinner before. results X-ray photoelectron spectroscopy supported these facts; namely, it shown spectrum Ti 2p near peak intensity decreases while metal increases 400°C baking; O 1s becomes smaller bulk larger baking, which implies thermal diffusion oxygen bulk; reduced firing. removal sputtering also throughput method. After chamber, become other side orifice, pumped turbomolecular A large pumping speed was obtained CO, O2, and CO2. Furthermore, non-evaporable (NEG) coated film, developed prevent from decreasing repeated air exposure activation process. final not deteriorated even 10 times activation. This fact indicated on NEG coating would diffuse into there no barrier between chamber.
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ژورنال
عنوان ژورنال: E-journal of Surface Science and Nanotechnology
سال: 2022
ISSN: ['1348-0391']
DOI: https://doi.org/10.1380/ejssnt.2022-017